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Department of Materials Science and Engineering
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Oral Qualifying Exam on Electronic Materials Processing
The material covered for the Electronic Materials Processing Oral Exam include topics covered by the following texts and a partial list given below.
Texts
"Solid State Electronic Devices" by B. G. Streetman, Prentice Hall.
"Electronic Materials Science" by J. W. Mayer & S. S. Lau, Macmillan Publishing Co.
Topics
- Conductors for Integrated Circuits (simple metals, metal alloys)
- Sputter Deposition of Thin Films
- Dielectrics for Integrated Circuits
- Chemical mechanical polishing
- Rapid thermal processing
- Introduction to lithography
- Photoresists
- Reactive Ion Etching
- Ion Implantation
- Silicides
- Diffusion Barriers
- Oxidation of Si