MATSE 460: Electronic Materials and Processing I, Semiconductors and Semiconductor Processing

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Textbook: A. Rockett, Semiconductor Materials Science, Kluwer, in preparation. Draft copy in use by the class.

James W. Mayer and S.S. Lau, Electronic Materials Science for Integrated Circuits in Si and GaAs, MacMillan and course notes.

References:

M.A. Herman and H. Sitter, Molecular Beam Epitaxy Fundamentals and Current Status (Springer-Verlag).
J.Y. Tsao, Materials Fundamentals of Molecular Beam Epitaxy.
Linda M. Miller and James J. Coleman, "Metalorganic Chemical Vapor Deposition", CRC Critical Reviews.
J.W. Matthews, Epitaxial Growth, Part B (Academic).
A.W. Adamson, Physical Chemistry of Surfaces (John Wiley).
Ben G. Streetman, Solid State Electronic Devices (Prentice-Hall).
Keshra Sangwal, Etching of Crystals (North Holland).
S.M. Sze, VLSI Technology (McGraw-Hill).
R.A. Levy, Microelectronic Materials and Processes (Kluwer).
R.E. Hummel, Electronic Properties of Materials (Springer-Verlag).

Catalog Description, Prerequisites and Schedule:

Introduces senior engineers and new graduate students to the materials science, engineering, and processing of semiconductors. The structure and chemistry of semiconductors are related to the electronic and optical properties. Includes: how semiconductors are produced and how to control processing to achieve desired materials properties; how to design and produce novel materials to obtain superior performance from electronic devices. Prerequisite: PHYS 214; MATH 385 or consent of instructor; MSE 304 or PHYS 460, ECE 440, or equivalent. Course credit: 3 hours. contact hours: 3 lectrue hours/week.

Course Topics:

1. Overview of the Physics of Solids
a. Crystallography and diffraction in electronic materials
b. Energy band structures, capacitance, conductivity.
2. Overview of Diodes, Schottky Barriers, and Heterojunctions
3. Semiconductor Crystal Growth (Basic mechanisms of growth, Czochralsky method, molecular beam epitaxy, chemical vapor deposition)
4. Physics of Semiconductors (Band theory, semiconductor design based on bond chemistry, semiconductor alloy design, amorphous semiconductors, defects in semiconductors and their engineering)
5.Doping of Semiconductors
6.Organic Light Emitting Materials
7. Magnetic Electronic Materials

Course Objectives:

1. To provide an in-depth description of the materials science that underlies the semiconductors in microelectronic devices. (In particular, structure-processing-properties relationships.)
2. To describe and provide a fundamental understanding of techniques for design and engineering of semiconductors for microelectronics.
3. To teach students the physical processes which underlie the optoelectronic behavior of semiconductors.
4. To teach students the three primary methods of growing crystals in microelectronics with emphasis on the relationship of process parameters to the materials properties that result.
5. To illustrate the application of basic materials science to electronic materials design (alloy theory and phase diagrams, point and extended defects in materials and their thermodynamics, process kinetics, polymer science.
6. To challenge students with open ended design questions integrating the course material with materials from previous classes.

Course Outcomes:

1. Given a hypothetical or real problem with an electronic materials device or process, explain the cause of the problem and propose solutions to the problem.
2. Prepare a high quality term paper on a subject of relevance to electronic materials and processing.
3. Explain, based on the energy/momentum diagrams for a solid or the atomic orbital energies, the nature of a semiconductor (bonding character, optoelectronic properties, band edge offsets, etc) or the nature of expected defects in the material (level depth, hydrogenic or deep level character).
4. Recommend processes or conditions for a given process for fabrication of semiconductors.
5. Given the performance of an electronic device, diagnose problems and predict the nature of the defects giving rise to these. Recommend methods for improvement.
6. Understand the design of organic light emitting and conductive polymers and the engineering of contacts and luminescent die materials.

Assessment Tools:

1. Homework problems involving open-ended questions and design problems.
2. Three closed book exams designed to test the student's ability to apply his/her knowledge.
3. A term paper graded on effectiveness, content, organization, and English composition.
4. An oral summary of the term paper and answers to questions from the class.
5. Team learning approach. Students work in teams on a term paper.

Contribution of Course to Meeting the Professional Component

100%

Prepared by:

Angus Rockett, Septebmer 2006